The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2026
Filed:
Nov. 13, 2024
Samsung Electronics Co., Ltd., Suwon-si, KR;
Sungyong Lim, Suwon-si, KR;
Yongwon Cho, Suwon-si, KR;
Hwasoo Seok, Suwon-si, KR;
Kyungsun Kim, Suwon-si, KR;
Sungyeol Kim, Suwon-si, KR;
Donghyeon Na, Suwon-si, KR;
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Abstract
A frequency and power modulation radio frequency (RF) generator includes a first frequency and power modulation RF generator including a signal generator configured to generate an RF signal, an amplifier configured to amplify power of the RF signal from the signal generator, and a phase controlled power correction (PCPC) circuit configured to control a phase of the RF signal amplified by the amplifier. The signal generator, the amplifier, and the PCPC circuit are controlled to perform multi-level pulsing and frequency modulation on the RF signal, thereby supplying RF power of the RF signal to a chamber. The multi-level pulsing has pulse forms with different power levels.