The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2026
Filed:
Dec. 06, 2022
Ngk Insulators, Ltd., Nagoya-City, JP;
Mikiya Tadaki, Chita-Gun, JP;
Kazuhiro Nobori, Handa-City, JP;
Takuya Yokono, Komaki-City, JP;
Keita Yamana, Nagoya-City, JP;
Reon Takanoya, Handa-City, JP;
Atsuki Iriyama, Iwakura-City, JP;
NGK INSULATORS, LTD., Nagoya, JP;
Abstract
A wafer placement table includes a conductor unit. In the wafer placement table, a sub-RF electrode (first conductive layer) and a jumper layer (second conductive layer) are embedded at different levels in a ceramic substrate having a wafer placement surface, and the conductor unit establishes electrical continuity between the sub-RF electrode and the jumper layer. The conductor unit is a transversely placed coil or a transversely placed perforated cylindrical body.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile