The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2026
Filed:
Oct. 05, 2022
Applicant:
Industry-academic Cooperation Foundation, Yonsei University, Seoul, KR;
Inventors:
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/075 (2006.01); G03F 7/20 (2006.01); G03F 7/34 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0757 (2013.01); G03F 7/2002 (2013.01); G03F 7/346 (2013.01);
Abstract
The inventive concept relates to a block copolymer for lithography, capable of self-assembling and self-healing, and more particularly, to a block copolymer including a first block which is a repeating unit of polymerized siloxane and a second block which is a repeating unit of polymerized alkyl azobenzene acrylate. The alkyl is a linear or branched chain of 1 to 10 carbon atoms, the number (x) of the repeating unit of polymerized siloxane is about 60 to about 80, and the number (y) of the repeating unit of polymerized alkyl azobenzene acrylate is about 15 to about 25. The block copolymer has a cylindrical phase.