The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2026
Filed:
Jun. 26, 2024
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
Anirudhan Chandrasekaran, Scottsdale, AZ (US);
Jereld Lee Winkler, Gilbert, AZ (US);
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/452 (2006.01); C23C 16/455 (2006.01); C23C 16/48 (2006.01);
U.S. Cl.
CPC ...
C23C 16/452 (2013.01); C23C 16/45512 (2013.01); C23C 16/45544 (2013.01); C23C 16/45561 (2013.01); C23C 16/48 (2013.01);
Abstract
Various embodiments of the present technology may provide a valve assembly that activates chemistry using UV light. The valve assembly includes a primary valve manifold connected to secondary valve manifolds. A transparent connector may be disposed between the primary valve manifold and the secondary valve manifold. A UV light may be disposed adjacent to the transparent connector.