The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2026
Filed:
Dec. 23, 2022
Applicant:
Semes Co., Ltd., Cheonan-si, KR;
Inventors:
A Rah Cho, Daejeon, KR;
Woo Sin Jung, Cheonan-si, KR;
Hae Kyung Kim, Cheonan-si, KR;
Dae Sung Kim, Cheonan-si, KR;
Assignee:
SEMES CO., LTD., Cheonan-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05B 15/50 (2018.01); B01D 19/00 (2006.01); B05B 1/00 (2006.01); B05B 12/08 (2006.01); B05B 15/20 (2018.01);
U.S. Cl.
CPC ...
B01D 19/0036 (2013.01); B01D 19/0047 (2013.01); B05B 1/005 (2013.01); B05B 12/088 (2013.01); B05B 15/20 (2018.02); B05B 15/50 (2018.02);
Abstract
Provided is an equipment for treating a substrate. The substrate treating equipment may include: a nozzle supplying a chemical solution to a substrate; and a chemical solution supply apparatus supplying the chemical solution to the nozzle, and the chemical solution supply apparatus may include a pump member, an extraction nozzle provided on a flow path through which the chemical solution is introduced into the pump member and spraying the chemical solution by a spray scheme, and a control unit controlling an operation of the pump member.