The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 19, 2026

Filed:

Mar. 27, 2023
Applicant:

Kokusai Electric Corporation, Tokyo, JP;

Inventors:

Yuna Suizu, Toyama, JP;

Hajime Abiko, Toyama, JP;

Susumu Nishiura, Toyama, JP;

Mitsuru Funakura, Toyama, JP;

Takuya Kato, Toyama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10P 72/00 (2026.01); C23C 16/455 (2006.01); C23C 16/46 (2006.01); G05B 19/418 (2006.01); H10P 72/30 (2026.01); H10P 72/76 (2026.01);
U.S. Cl.
CPC ...
H10P 72/0612 (2026.01); C23C 16/45563 (2013.01); C23C 16/46 (2013.01); G05B 19/4189 (2013.01); H10P 72/3412 (2026.01); H10P 72/7602 (2026.01); G05B 2219/37612 (2013.01);
Abstract

According to one aspect of the technique of the present disclosure, there is provided a method of displaying substrate arrangement data, including: (a) setting each of a transport parameter for determining at least an arrangement of substrates to be loaded into a substrate retainer and carrier information of a carrier storing the substrates to be loaded into the substrate retainer; (b) creating the substrate arrangement data of a case where the substrates are loaded into the substrate retainer based on the transport parameter and the carrier information set in (a); and (c) displaying the substrate arrangement data at least comprising data representing the arrangement of the substrates in a state where the substrates are loaded in the substrate retainer.


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