The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2026
Filed:
Feb. 28, 2020
Applicant:
Microsoft Technology Licensing, Llc, Redmond, WA (US);
Inventors:
Assignee:
Microsoft Technology Licensing, LLC, Redmond, WA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10P 14/20 (2026.01); G03F 7/004 (2006.01); G03F 7/20 (2006.01); H10D 62/10 (2025.01); H10P 14/22 (2026.01);
U.S. Cl.
CPC ...
H10P 14/271 (2026.01); G03F 7/004 (2013.01); G03F 7/2059 (2013.01); H10D 62/121 (2025.01); H10P 14/3411 (2026.01); H10P 14/22 (2026.01);
Abstract
A shadow wall for controlling directional deposition of a material is arranged on a substrate. The shadow wall comprises a base portion and a bridge portion. The base portion is arranged on the substrate and is configured to support the bridge portion. The bridge portion overhangs the substrate. The shadow wall may have improved compatibility with non-directional deposition processes, because adatoms on the surface of the substrate may diffuse under the bridge. Also provided are a method of fabricating a device using the shadow wall, and a method of fabricating the shadow wall.