The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2026
Filed:
Jul. 05, 2022
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
Huan-Chieh Su, Changhua County, TW;
Chun-Yuan Chen, HsinChu, TW;
Lin-Yu Huang, Hsinchu, TW;
Chih-Hao Wang, Hsinchu County, TW;
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu, TW;
Abstract
A method for forming a semiconductor device structure is provided. The method includes providing a substrate, a nanostructure, an isolation structure, an isolation fin, and a gate stack. The method includes turning the substrate upside down and removing the base to expose the isolation structure. The method includes partially removing the isolation structure to form a first trench in the isolation structure. The first trench exposes a portion of the isolation fin. The method includes removing the portion of the isolation fin through the first trench to form a second trench in the gate stack. The method includes partially removing the gate stack through the first trench and the second trench. The second trench passes through the gate stack and divides the gate stack into a first part and a second part.