Switching element

Abstract

A switching element includes a semiconductor substrate having inter-trench semiconductor layers each interposed between trenches and including a body region. The semiconductor substrate further includes deep regions and connection regions that connect the deep regions and the body region. The connection regions are arranged in rows. Intersection portions of the inter-trench semiconductor layers and the rows include connection intersection portions at which the connection regions are disposed and non-connection intersection portions at which the connection regions are not disposed. The connection intersection portions and the non-connection intersection portions are repeatedly arranged according to a reference pattern in which a number of the non-connection intersection portions interposed between adjacent two of the connection intersection portions is three or four, and a Manhattan distance of each of the non-connection intersection portions to closest one of the connection intersection portions is 1.