The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 19, 2026

Filed:

Nov. 08, 2022
Applicant:

Gigaphoton Inc., Tochigi, JP;

Inventors:

Akira Suwa, Oyama, JP;

Kouji Kakizaki, Oyama, JP;

Masakazu Kobayashi, Oyama, JP;

Junichi Fujimoto, Oyama, JP;

Yasufumi Kawasuji, Oyama, JP;

Assignee:

Gigaphoton Inc., Tochigi, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H05K 3/46 (2006.01); B23K 26/066 (2014.01); H05K 3/40 (2006.01);
U.S. Cl.
CPC ...
H05K 3/46 (2013.01); B23K 26/066 (2015.10); H05K 3/4038 (2013.01); H05K 2203/107 (2013.01);
Abstract

A laser processing method according to a viewpoint of the present disclosure includes radiating ultraviolet pulse laser light onto a workpiece having a stacked structure in which a conductor layer, an insulating layer, and a sacrificial layer are stacked on each other in the presented order, the pulse laser light radiated from the side facing the sacrificial layer, to change a laser ablation processing mode in the sacrificial layer and form a through hole in the sacrificial layer, radiating the pulse laser light onto the insulating layer through the through hole to form an opening in the insulating layer, and removing the sacrificial layer after the formation of the opening.


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