The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2026
Filed:
Sep. 07, 2023
Ict Integrated Circuit Testing Gesellschaft Für Halbleiterprüftechnik Mbh, Heimstetten, DE;
Pieter Kruit, Delft, NL;
Abstract
An electron beam apparatus () is described, including an electron source () configured to generate a primary electron beam propagating along an optical axis (A), a sample stage () configured to support a sample, an objective lens () configured to focus the primary electron beam on the sample for causing an emission of a signal electron beam and a foil or grid lens () for influencing the signal electron beam. The foil or grid lens includes an electrode () that surrounds the optical axis; and a first foil or grid () adjacent to the electrode and perpendicular to the optical axis, the first foil or grid being substantially transparent to electrons, wherein a central opening () configured to allow the primary electron beam to pass through the central opening is provided in the first foil or grid.