The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 19, 2026

Filed:

Jul. 06, 2021
Applicant:

Beijing Naura Microelectronics Equipment Co., Ltd., Beijing, CN;

Inventor:

Jiajia Chai, Beijing, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 30/3323 (2020.01); G06F 30/367 (2020.01);
U.S. Cl.
CPC ...
G06F 30/3323 (2020.01); G06F 30/367 (2020.01);
Abstract

Embodiments of the present disclosure provide a semiconductor equipment modeling method. The method includes, in response to an adding instruction operation, determining a type of a source controller configured to display an equipment model object and a type of a target controller configured to display an equipment model tree, using a verification module corresponding to the type of the source controller and the type of the target controller to obtain information of the selected to-be-added model and information of the selected target model, performing verification on the information of the to-be-added model and the information of the target model based on a predetermined equipment modeling type verification criterion library to determine whether the to-be-added model is able to be used as a sub-node of the target model, and displaying a verification result indicating whether the to-be-added model is able to be used as the sub-node of the target model.


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Chai, Jiajia. (2026). Semiconductor equipment modeling method and device (U.S. Patent No. 12632630). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12632630

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