The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2026
Filed:
Dec. 20, 2023
Canon Kabushiki Kaisha, Tokyo, JP;
Steven C. Shackleton, Austin, TX (US);
Seth J. Bamesberger, Austin, TX (US);
Byung-Jin Choi, Austin, TX (US);
Timothy Brian Stachowiak, Austin, TX (US);
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
A system can include a substrate chuck, an actinic radiation source for curing a photocurable composition, and an insertable object that can be moved between a retracted state and an inserted state. The object can be a thermal shield or a heating member including a heating element. When in an inserted state, the heating element can be disposed between the substrate chuck and the actinic radiation source, or the thermal shield can be disposed between a substrate and the substrate chuck. During heating, the heating member, the thermal shield, or both can help to reduce the amount of heat received by the substrate chuck, a positioning stage, or both.