Semiconductor structure having biosensor and manufacturing method thereof

Abstract

A semiconductor structure includes an isolation structure penetrating through a semiconductor substrate, a biosensor coupled to the semiconductor substrate, and a cover. The biosensor includes a bio-sensing device, a voltage-reference device spaced apart from the bio-sensing device, thermal management devices in proximity to the bio-sensing device, and a patterned dielectric layer. Each of the bio-sensing and voltage-reference devices includes a gate structure disposed on a bottom surface of the semiconductor substrate, source/drain (S/D) regions disposed in the semiconductor substrate, and a portion of a sensing film disposed on the semiconductor substrate and capacitively coupled to the gate structure and the S/D regions. Each thermal management devices includes a gate structure underlying the isolation structure or the semiconductor substrate. The patterned dielectric layer overlying the semiconductor substrate includes sensing wells located above the voltage-reference and bio-sensing devices. The cover overlying the patterned dielectric layer includes fluid channels communicating with the sensing wells.