The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 12, 2026

Filed:

May. 24, 2024
Applicant:

Advantest Corporation, Tokyo, JP;

Inventors:

Takao Sakurai, Miyagi, JP;

Nobutaka Takahashi, Miyagi, JP;

Yoshinori Kikuchi, Saitama, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/3586 (2014.01); G01N 21/3504 (2014.01); G01N 22/00 (2006.01);
U.S. Cl.
CPC ...
G01N 21/3586 (2013.01); G01N 21/3504 (2013.01); G01N 22/00 (2013.01); G01N 2021/3509 (2013.01);
Abstract

An electromagnetic wave measuring apparatus irradiates an irradiation target having a measuring target with a pre-irradiation electromagnetic wave and, based on a post-irradiation electromagnetic wave obtained, measures the measuring target. The post-irradiation electromagnetic wave has a response component from the measuring target and a background component corresponding to the pre-irradiation electromagnetic wave. The electromagnetic wave measuring apparatus includes a first frequency spectrum acquiring section, a second frequency spectrum acquiring section, and a subtracting section. The first frequency spectrum acquiring section acquires a frequency spectrum of a first signal that includes the background component and the response component of the post-irradiation electromagnetic wave. The second frequency spectrum acquiring section acquires a frequency spectrum of a second signal that includes the background component of the post-irradiation electromagnetic wave. The subtracting section subtracts the frequency spectrum of the second signal from the frequency spectrum of the first signal.


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