The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2026
Filed:
Dec. 18, 2023
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventor:
Taira Okabe, Kawasaki, JP;
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B25J 15/00 (2006.01); B06B 1/06 (2006.01); B25J 11/00 (2006.01);
U.S. Cl.
CPC ...
B25J 15/0014 (2013.01); B06B 1/0629 (2013.01); B25J 11/0095 (2013.01); B25J 15/0004 (2013.01); B25J 15/0019 (2013.01); B06B 2201/70 (2013.01);
Abstract
An End effector is disclosed. The exemplary end effector includes a substrate-supporting body for placing the substrate thereon; and a first array of wave generators disposed in the substrate-supporting body and configured to generate a surface wave to a backside of the substrate.