The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2026
Filed:
Mar. 18, 2024
Applied Materials, Inc., Santa Clara, CA (US);
Manikandan Jayaraman, Santa Clara, CA (US);
Jagadeesh Kumar Sukumaran, Santa Clara, CA (US);
Jagan Rangarajan, San Jose, CA (US);
Ekaterina A. Mikhaylichenko, San Jose, CA (US);
Yunshuang Ding, Santa Clara, CA (US);
Yuwen Huang, Santa Clara, CA (US);
Timothy Thao, Santa Clara, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
In one embodiment, a nozzle assembly includes a body with an internal surface forming an internal cavity within the body. The assembly also includes a gas inlet disposed within the body, a fluid inlet disposed within the body and a mixing chamber disposed within the internal cavity of the body, such that an annular gap is formed between the internal surface and an exterior surface of the mixing chamber, the mixing chamber may include: a mixing body region within the mixing chamber; one or more gas ports fluidly connecting the gas inlet to the mixing chamber, the gas ports tangentially aligned with an interior surface of the mixing chamber; a fluid port in fluid communication with the fluid inlet of the body and the mixing body region of the mixing chamber; and an outlet in fluid communication with the mixing body region configured to deliver a fluid mixture.