The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 05, 2026

Filed:

Jun. 27, 2023
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Tzu-Hsiang Hsu, Hsinchu, TW;

Sun-Yi Chang, Hsinchu, TW;

Katherine H. Chiang, Hsinchu, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/311 (2006.01); H01L 21/3105 (2006.01); H01L 21/768 (2006.01); H10D 84/83 (2025.01);
U.S. Cl.
CPC ...
H01L 21/31144 (2013.01); H01L 21/31051 (2013.01); H01L 21/768 (2013.01); H10D 84/83 (2025.01);
Abstract

A method for manufacturing a semiconductor structure includes: forming an interconnect level structure having a first device region, a first side region aside the first device region, a second device region and a second side region aside the second device region; forming a dielectric layer over the interconnect structure, the dielectric layer including a first dielectric portion, a second dielectric portion, a first patterned portion and a second patterned portion that are respectively formed over the first device region, the second device region, the first side region, and the second side region, the first patterned portion and the second patterned portion being formed with different patterns; performing a planarization process on the dielectric layer; forming first recesses and second recesses respectively in the planarized first dielectric portion and the planarized second dielectric portion; and forming contact portion respectively in the first recesses and the second recesses.


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