The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 05, 2026

Filed:

Jul. 01, 2022
Applicants:

Shin-etsu Polymer Co., Ltd., Tokyo, JP;

Shin-etsu Chemical Co., Ltd., Tokyo, JP;

National University Corporation Saitama University, Saitama, JP;

Inventors:

Junichi Ikeno, Saitama, JP;

Yohei Yamada, Saitama, JP;

Hideki Suzuki, Saitama, JP;

Rika Matsuo, Saitama, JP;

Hitoshi Noguchi, Tokyo, JP;

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); C30B 29/04 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02376 (2013.01); H01L 21/02527 (2013.01); H01L 21/0262 (2013.01); C30B 29/04 (2013.01);
Abstract

A method of manufacturing a diamond substrate includes: a step of placing a laser condensing unitconfigured to condense laser light B so as to face an upper surfaceof a blockof single crystal diamond; and a step of forming a modified layerwhich includes a processing markof graphite and a crackextending along a surface () around the processing markalong the surface () of the single crystal diamond at a predetermined depth from an upper surface of the block by radiating the laser light B on the upper surfaceof the blockfrom the laser condensing unitunder predetermined conditions and condensing the laser light B inside the blockand moving the laser condensing unitand the blockin a relative manner two-dimensionally.


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