The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2026
Filed:
May. 12, 2023
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Markus Seesselberg, Aalen, DE;
Johannes Stock, Ellwangen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 27/10 (2006.01); C03B 33/10 (2006.01); C03C 23/00 (2006.01); G01J 9/00 (2006.01); G02B 19/00 (2006.01); G02B 27/00 (2006.01); G02B 27/16 (2006.01); G02F 1/1362 (2006.01); G03F 9/00 (2006.01);
U.S. Cl.
CPC ...
G02B 27/16 (2013.01); C03B 33/102 (2013.01); C03C 23/0025 (2013.01); G01J 9/00 (2013.01); G02B 19/0009 (2013.01); G02B 19/0047 (2013.01); G02B 27/0075 (2013.01); G02B 27/1093 (2013.01); G02F 1/136277 (2013.01); G03F 9/7026 (2013.01); G02B 27/106 (2013.01); G02F 2203/12 (2013.01); G02F 2203/50 (2013.01);
Abstract
The invention relates to a device for focusing a photon beam into a material. The device comprises: means for splitting the photon beam into a plurality of component beams; means for focusing the component beams at a predetermined focal depth within the material; and means for adapting the wavefronts of the component beams based at least in part on the focal depth.