The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2026
Filed:
Apr. 27, 2023
Etrology, Llc, Sandy, OR (US);
Vladislav Kaplan, Raanana, IL;
ETROLOGY, LLC, , OR (US);
Abstract
A system and method for denoising a grey scale image of a pattern on a substrate, including: scanning a gaussian beam consecutively across scanlines extending along an x direction, wherein the scan lines are disposed adjacent to each other in a y direction within a predetermined region of the pattern, obtaining waveforms from secondary electrons and backscattered electrons reflected from the scanned pattern; converting the waveforms into a grey scale image, and applying a gaussian weighted distribution for each of the scan lines of the grey scale image and the neighboring scan lines of the grey scale image to account for the impact of the neighboring scan lines to each scan line.