The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2026
Filed:
Sep. 25, 2023
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Martin Endres, Koenigsbronn, DE;
CARL ZEISS SMT GMBH, Oberkochen, DE;
Abstract
An apparatus () for interferometrically measuring a surface shape () of a test object () in relation to a reference shape () includes (a) a diffractive optical element () generating a test wave () from measurement radiation (), whereas a wavefront () of the test wave is adapted to a target shape () of the surface () of the test object () and the target shape is configured as a first non-spherical surface, (b) a reference element () with a reference surface () having the reference shape (), the reference shape being configured as a further non-spherical surface, (c) a first holder () configured to arrange the test object () in the beam path of the test wave () in a measurement configuration, and (d) a further holder () configured to arrange the reference element () in the beam path of a reference wave () in the measurement configuration.