The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2026
Filed:
Jun. 09, 2023
Kioxia Corporation, Tokyo, JP;
Kazuhiro Katono, Yokkaichi Mie, JP;
Kazuhiro Matsuo, Kuwana Mie, JP;
Yusuke Miki, Yokkaichi Mie, JP;
Kenichiro Toratani, Yokkaichi Mie, JP;
Akifumi Gawase, Kuwana Mie, JP;
Kioxia Corporation, Tokyo, JP;
Abstract
In one embodiment, a film forming apparatus includes a chamber configured to load a substrate, a stage configured to support the substrate, and a gas supplier configured to supply a gas into the chamber to form a film on the substrate. The device further includes a first detector configured to detect a first value that varies depending on at least pressure of a first portion above the stage in the chamber, and a controller configured to control a process of forming the film on the substrate based on the first value.