The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2026
Filed:
Apr. 18, 2023
Tokyo Electron Limited, Tokyo, JP;
Kuniyasu Sakashita, Oshu, JP;
Tosihiko Jo, Nirasaki, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A substrate processing apparatus includes: an inner cylinder having a first region formed inside the inner cylinder to accommodate a substrate; an outer cylinder provided outside the inner cylinder with a second region interposed between the inner cylinder and the outer cylinder and including an exhaust port formed in an end portion of a sidewall of the outer cylinder; a nozzle configured to discharge a gas to the first region; and a gas flow regulator including a plurality of slits provided from an upstream side toward a downstream side in a flow direction of the gas in a flow path of the gas from the first region to the exhaust port.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile