The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2026
Filed:
Dec. 16, 2021
Semiconductor Energy Laboratory Co., Ltd., Atsugi, JP;
Daiki Nakamura, Atsugi, JP;
Tomoya Aoyama, Atsugi, JP;
Yasutaka Nakazawa, Tochigi, JP;
Rai Sato, Tochigi, JP;
Seiji Yasumoto, Tochigi, JP;
Kiyofumi Ogino, Isehara, JP;
Takashi Shiraishi, Tochigi, JP;
Semiconductor Energy Laboratory Co., Ltd., Atsugi, JP;
Abstract
A method for fabricating a display device that easily achieves higher resolution is provided. A display device having both high display quality and high resolution is provided. A first EL film is formed over a first pixel electrode and a second pixel electrode; a first sacrificial film is formed to cover the first EL film; the first sacrificial film and the first EL film are etched to expose the second pixel electrode and to form a first EL layer over the first pixel electrode and a first sacrificial layer over the first EL layer; and the first sacrificial layer is removed. The first EL film and the second EL film are etched by dry etching, and the first sacrificial layer is removed by wet etching.