The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 21, 2026

Filed:

Aug. 31, 2022
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Oreste Madia, Brussels, BE;

Gerben Doornbos, Kessel-Lo, BE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H10N 19/00 (2023.01); H01L 21/762 (2006.01); H01L 23/528 (2006.01); H01L 23/58 (2006.01); H10D 30/01 (2025.01); H10D 30/62 (2025.01); H10D 84/85 (2025.01); H10N 10/01 (2023.01);
U.S. Cl.
CPC ...
H10N 19/00 (2023.02); H01L 21/76224 (2013.01); H01L 23/5286 (2013.01); H01L 23/58 (2013.01); H10D 30/024 (2025.01); H10D 30/6211 (2025.01); H10D 84/853 (2025.01); H10N 10/01 (2023.02);
Abstract

A semiconductor structure includes a substrate, a device, a conductor, a backside interconnect, and a thermoelectric generator. The substrate has a front surface and a rear surface opposite to the front surface. The device is disposed on the front surface of the substrate. The conductor is disposed at or near the front surface of the substrate and electrically coupled to the device. The backside interconnect is disposed on the rear surface of the substrate and electrically coupled to the device. The thermoelectric generator is disposed in the substrate and electrically coupled to the device, and includes a first-type through via and a second-type through via. The first-type through via penetrates from the rear surface of the substrate to the conductor, and is connected to a first conductive feature of the backside interconnect and the conductor. The second-type through via penetrates from the rear surface of the substrate to the conductor, and is connected to a second conductive feature of the backside interconnect and the conductor. The second-type through via is different from the first-type through via.


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