The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2026
Filed:
Oct. 30, 2020
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventor:
Yongxin Wang, San Ramon, CA (US);
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
H10F 30/29 (2025.01); H01J 37/244 (2006.01); H01L 23/00 (2006.01); H10F 77/00 (2025.01); H10F 77/50 (2025.01);
U.S. Cl.
CPC ...
H10F 30/29 (2025.01); H01J 37/244 (2013.01); H01L 24/48 (2013.01); H10F 77/50 (2025.01); H10F 77/933 (2025.01); H01J 2237/28 (2013.01); H01L 2224/48225 (2013.01);
Abstract
A charged particle beam system may include a detector. A package for a detector may have a package body that includes two sets of pins, each of the sets of pins including two pins. Each pin of the sets of pins may be configured to be connected to one of two terminals of a sensing element. Pins of different sets may be configured to be connected to a different one of the two terminals of the diode. The sets of pins may be arranged with a symmetry such that magnetic fields generated when current passes through the sets of pins is reduced due to the symmetry.