The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2026
Filed:
May. 09, 2023
Applicant:
Hermes Testing Solutions Inc., Hsinchu City, TW;
Inventors:
Wei-Ting Chen, Hsinchu City, TW;
Shih-Ying Chou, Hsinchu City, TW;
Assignee:
HERMES TESTING SOLUTIONS INC., Hsinchu City, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 1/073 (2006.01); G01R 1/02 (2006.01); G01R 1/04 (2006.01); G01R 1/067 (2006.01); G01R 31/02 (2006.01); G01R 31/26 (2020.01); G01R 31/28 (2006.01);
U.S. Cl.
CPC ...
G01R 1/07342 (2013.01); G01R 1/07314 (2013.01); G01R 31/2889 (2013.01);
Abstract
A probe card monitoring system is adapted for any one of a probe card including a reinforcement frame and a printed circuit board or a prober including a head plate and a clamping mechanism, and includes at least one sensor and a control unit. The at least one sensor is disposed in one of the probe card and the prober to measure a distance between the probe card and the prober in at least one axial direction. The control unit is coupled to the at least one sensor and is configured to issue an alarm. A probe card monitoring method is also provided.