The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2026
Filed:
May. 17, 2024
Tokyo Electron Limited, Tokyo, JP;
Hideki Nagaoka, Yamanashi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A shower head includes a first diffusion chamber spreading inside a structure in a direction perpendicular to a thickness direction to diffuse a first gas, a second diffusion chamber provided independent of and adjacent to the first diffusion chamber in the thickness direction of the structure to diffuse a second gas, cylinders disposed in the first diffusion chamber and having holes communicating with the second diffusion chamber, first discharge ports in a discharge surface of the structure and communicating with the first diffusion chamber to discharge the first gas, and second discharge ports in the discharge surface at positions different from the first discharge ports and communicating with the holes to discharge the second gas. A central supply chamber of the structure supplies a radicalized third gas, and a third discharge port in a center of the discharge surface communicates with the central supply chamber to discharge the third gas.