The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 14, 2026

Filed:

Jan. 16, 2023
Applicant:

Taiwan Semiconductor Manufacturing Company Ltd., Hsinchu, TW;

Inventors:

Chih-Hsuan Tai, Taipei City, TW;

Hsiang-Tai Lu, Hsinchu County, TW;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H10D 1/66 (2025.01); H01L 23/522 (2006.01); H10D 1/00 (2025.01); H10D 62/10 (2025.01); H10D 64/01 (2025.01); H10D 64/20 (2025.01);
U.S. Cl.
CPC ...
H10D 1/665 (2025.01); H01L 23/5226 (2013.01); H10D 1/047 (2025.01); H10D 62/115 (2025.01); H10D 64/01 (2025.01); H10D 64/20 (2025.01);
Abstract

A semiconductor structure includes a substrate including a recess indented into the substrate, a capacitor structure at least partially disposed within the recess, and an interconnect structure disposed over and electrically connected to the capacitor structure. The capacitor structure includes a first electrode layer, a second electrode layer over the first electrode layer, and a first dielectric between the first electrode layer and the second electrode layer. The first electrode layer includes a first body portion disposed in and conformal to the recess and a first extending portion disposed on the substrate, and the second electrode layer covers the first dielectric, the first body portion and the first extending portion of the first electrode layer.


Find Patent Forward Citations

Tai, Chih-Hsuan. (2026). Semiconductor structure having deep trench capacitor and method of manufacturing thereof (U.S. Patent No. 12604487). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12604487

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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