The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2026
Filed:
Apr. 13, 2022
Applicant:
Nps Corporation, Hwaseong-Si, KR;
Inventors:
Assignee:
NPS CORPORATION, , KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05B 3/00 (2006.01);
U.S. Cl.
CPC ...
H05B 3/0033 (2013.01);
Abstract
The present inventive concept relates to a heat source device, a substrate support device, and a substrate processing facility comprising the same. According to the present inventive concept, a substrate can be uniformly heated and stably supported by a chamber having an inner space where the substrate is treated, and a substrate support device installed in the chamber to stably support the substrate and a heat source device installed in the chamber to uniformly heat the substrate.
Nam, Won. (2026). Heat source device, substrate support device and substrate processing facility (U.S. Patent No. 12604369). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12604369
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile