The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 14, 2026

Filed:

Apr. 04, 2024
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventor:

Michael Carl Hankes, Austin, TX (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B25J 11/00 (2006.01); H01J 37/244 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32807 (2013.01); B25J 11/0095 (2013.01); H01J 37/244 (2013.01); H01J 37/32889 (2013.01); H01J 37/32642 (2013.01); H01J 2237/24578 (2013.01);
Abstract

An aligner station includes an aligner stage configured to support a carrier of a process kit ring. The aligner stage is configured to rotate to correct an alignment of the carrier and of the process kit ring supported by the carrier relative to a target orientation. The aligner station further includes a lift mechanism configured to lift the process kit ring from the carrier. The aligner stage is further configured to rotated while the process kit ring is lifted from the carrier by the lift mechanism to align the carrier with respect to the process kit ring. The lift mechanism is further configured to lower the process kit ring back onto the carrier that is aligned with the process kit ring.


Find Patent Forward Citations

Hankes, Michael. (2026). Aligner station with lifting mechanism (U.S. Patent No. 12603261). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12603261

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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