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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12598980 B1

PDFFull Text
Date of Patent:
Apr. 07, 2026

Filed:

Jun. 30, 2022

Front end of line processing compatible thermally stable buried power rails

Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Sagarika Mukesh, Albany, NY (US);

Christian Lavoie, Pleasantville, NY (US);

Daniel Charles Edelstein, White Plains, NY (US);

Ruilong Xie, Niskayuna, NY (US);

Assignee:

International Business Machines Corporation, Armonk, NY (US);

Attorneys:

Scully, Scott, Murphy & Presser, P.C.

L. Jeffrey Kelly, Esq.

Primary Examiner:

Jeff W Natalini

Assistant Examiner:

Rose undefined Keagy

Int. Cl.
CPC ...
H01L 23/528 (2006.01); H01L 21/768 (2006.01); H01L 23/535 (2006.01); H10D 30/67 (2025.01); H10D 84/01 (2025.01); H10D 84/03 (2025.01); H10D 84/85 (2025.01);
U.S. Cl.
CPC ...
H01L 23/5286 (2013.01); H01L 21/76898 (2013.01); H01L 23/535 (2013.01); H10D 30/6757 (2025.01); H10D 84/0186 (2025.01); H10D 84/038 (2025.01); H10D 84/853 (2025.01);
Abstract

Semiconductor devices, and methods of their formation, are provided. The semiconductor device can include a substrate; a wiring level within the substrate; and at least one buried power rail within the wiring level, wherein the at least one buried power rail is divided into a plurality of rail segments, wherein each rail segment of the plurality of rail segments has a length smaller than a total length of the buried power rail.

Find Patent Forward Citations

Quick Actions:

Mukesh, Sagarika. (2026). Front end of line processing compatible thermally stable buried power rails (U.S. Patent No. 12598980). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12598980

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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