The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2026
Filed:
Jan. 09, 2023
Changxin Memory Technologies, Inc., Hefei City, CN;
Jing Liu, Hefei, CN;
CHANGXIN MEMORY TECHNOLOGIES, INC., Beijing, CN;
Abstract
The disclosure relates to the technical field of semiconductors, and to a method, apparatus and system for processing a semiconductor structure. The processing method of the disclosure includes: providing a semiconductor substrate; forming a photoresist layer on the semiconductor substrate, the photoresist layer including an edge area and a middle area that are adjacently distributed, the edge area including a protrusion; detecting position information of the protrusion, and determining a target etching area according to the position information, the protrusion being located in the target etching area; and etching the photoresist layer located in the target etching area. By means of the processing method of the disclosure, the maintenance cost of a device can be reduced, and product yield can be improved.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile