The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2026
Filed:
Jun. 27, 2022
Applied Materials Israel Ltd., Rehovot, IL;
Haim Feldman, Nof-Ayalon, IL;
Applied Materials Israel Ltd., Rehovot, IL;
Abstract
A light source system is disclosed, the system comprises: a multimode laser unit; a first lenslet array positioned in a path of said laser beam and configured to form an array of focused spots in a selected plane downstream of said first lenslet array; a spatial filter mask carrying an array of pinholes positioned in said selected plane; a second lenslet array having spatial arrangement of lenslets similar to the first lenslet array and positioned such that said spatial filter mask is in a back focal plane of said second lenslet array, thereby collimating laser light from the array of focused spots into a corresponding array of beamlets; and a third lenslet array positioned downstream of said second lenslet array, configured for focusing said array of beamlets to form an output spot array at an exit pupil of said light source system.