The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2026
Filed:
Mar. 25, 2022
Shimadzu Corporation, Kyoto, JP;
SHIMADZU CORPORATION, Kyoto, JP;
Abstract
A defect inspection apparatus () according to the present invention includes an exciter (), an irradiator (laser illuminator) configured to irradiate an inspection target () with laser light, and a measurer () configured to change a phase of the laser light reflected by the inspection target () to cause the laser light having an unchanged phase to interfere with the laser light having a changed phase, and to measure the interference light. The measurer () is configured to acquire an interference image () representing a vibration state of the inspection target () as viewed in a direction extending along a first light path (), and an interference image () representing a vibration state of the inspection target () as viewed in a direction extending along a second light path () in which the reflected laser light travels from the inspection target () in a direction different from the first light path ().