The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2026
Filed:
May. 01, 2023
Asm Ip Holding B.v., Almere, NL;
Moataz Bellah Mousa, Chandler, AZ (US);
Jiyeon Kim, Mesa, AZ (US);
Jaebeom Lee, Tempe, AZ (US);
Charith Eranga Nanayakkara, Tempe, AZ (US);
Paul MA, Scottsdale, AZ (US);
Chuandao Wang, Phoenix, AZ (US);
Youngchol Byun, Tempe, AZ (US);
Jacqueline Wrench, Mesa, AZ (US);
Guannan Chen, Phoenix, AZ (US);
ASM IP Holding B.V., Almere, NL;
Abstract
A method and system for forming a structure are disclosed. An exemplary method includes providing a substrate comprising a plurality of gaps within a first reaction chamber, forming a doped adhesion film on the surface of a substrate and within the plurality of gaps, wherein the doped adhesion film comprises a first material and a second material, and depositing a metal overlying the doped adhesion film. Exemplary methods can further include a step of depositing a nucleation layer overlying the doped adhesion film. An exemplary system can perform the method of forming the structure.