The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 07, 2026

Filed:

Feb. 25, 2020
Applicant:

Kurita Water Industries Ltd., Tokyo, JP;

Inventor:

Hideaki Iino, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C02F 1/20 (2023.01); C02F 1/42 (2023.01); C02F 1/66 (2023.01); C02F 9/00 (2023.01); H01L 21/304 (2006.01); C02F 103/04 (2006.01);
U.S. Cl.
CPC ...
C02F 1/66 (2013.01); C02F 1/20 (2013.01); C02F 1/42 (2013.01); C02F 9/00 (2013.01); H01L 21/304 (2013.01); C02F 2103/04 (2013.01); C02F 2301/08 (2013.01);
Abstract

A pH-adjusted water production device has a configuration in which a platinum group metal support resin column, a membrane-type degassing device, and a gas dissolving membrane device are provided on an ultra-pure water supply line, and a pH-adjuster injection device is provided between the platinum group metal support resin column and the membrane-type degassing device. An inert gas source is connected to the gas phase side of the membrane-type degassing device while an inert gas source is connected also on the gas phase side of the gas dissolving membrane device, and a discharge line communicates with the gas dissolving membrane device.


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