The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 2026
Filed:
Nov. 10, 2021
Tel Manufacturing and Engineering of America, Inc., Chaska, MN (US);
Matthew Gwinn, Winchendon, MA (US);
TEL Manufacturing and Engineering of America, Inc., Chaska, MN (US);
Abstract
A method including: collecting first processing tool machine data from a first processing tool while treating semiconductor substrates, the first processing tool machine data including process data and operational codes associated with one or more discrete intervals of time during the treatments, training a first neural network with the first processing tool machine data from the first processing tool, and generating a first output indicative of a fault of the first processing tool from the first neural network, based, at least in part, on applying subsequent machine data from at least one processing tool.