The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 2026
Filed:
Feb. 24, 2023
Applicant:
Ngk Insulators, Ltd., Nagoya-City, JP;
Inventors:
Toshikatsu Kashiwaya, Inazawa-City, JP;
Atsuo Kondo, Komaki-City, JP;
Hiroki Chaen, Yokohama-City, JP;
Takashi Tanimura, Handa-City, JP;
Assignee:
NGK INSULATORS, LTD., Nagoya, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/22 (2012.01); G02B 1/14 (2015.01);
U.S. Cl.
CPC ...
G03F 1/22 (2013.01); G02B 1/14 (2015.01);
Abstract
Provided is an EUV transmissive membrane including a main layer composed of metallic beryllium and a protective layer composed of beryllium nitride that covers at least one side of the main layer.