The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 2026
Filed:
Nov. 17, 2022
Unity Semiconductor, Montbonnot-Saint-Martin, FR;
Unity Semiconductor Gmbh, Dresden, DE;
Alexey Butkevich, Dresden, DE;
Jean Boulanger, Saint Ismier, FR;
Unity Semiconductor, Montbonnot-Saint-Martin, FR;
Unity Semiconductor GmbH, Dresden, FR;
Abstract
Method for discriminating defects present on a frontside of a transparent substrate from defects present on a backside of the substrate comprises disposing the substrate in an inspection system in which first and a second light beams intersect at a measurement spot on the frontside of the substrate. Relative movement of the substrate and measurement spot is controlled such that a reference plane is kept tangential to the measurement path. A first pattern is identified in a measurement signal, the first pattern corresponding to light scattered by a particle on the backside of the substrate and presenting two intensity peaks separated from each other by a determined separation interval corresponding to the time necessary for the defect to be moved over the distance separating two illumination spots on the backside of the substrate.