The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2026
Filed:
Jun. 09, 2023
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Eugen Doetzel, Ulm, DE;
Johannes Kruis, Oberkochen, DE;
Benjamin Sigel, Aalen, DE;
Dietmar Duerr, Dettingen, DE;
Tobias Hegele, Aalen, DE;
Alexander Ostendorf, Langenau, DE;
Sebastian Henseler, Aalen, DE;
Christian Beyrle, Aalen, DE;
Christian Werner, Beek en Donk, NL;
Alexander Kaniut, Remshalden, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
A method for swapping an optical system, such as a DUV mirror, of a projection exposure apparatus, comprises: a) raising the optical system along a centre axis of the optical system so that mount struts of the optical system pass out of contact with frame struts of a frame carrying the optical system; b) rotating the optical system about the centre axis so that the mount struts are arranged between the frame struts; c) lowering the optical system along the centre axis; and d) shifting the optical system perpendicularly to the centre axis so that the optical system is moved out of a housing.