The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2026
Filed:
Nov. 22, 2022
Applicant:
Rigaku Corporation, Tokyo, JP;
Inventors:
Akihiro Himeda, Tokyo, JP;
Takumi Ohta, Tokyo, JP;
Assignee:
RIGAKU CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/20 (2018.01); G06N 3/08 (2023.01); G01N 23/20008 (2018.01); G01N 23/201 (2018.01); G01N 23/207 (2018.01);
U.S. Cl.
CPC ...
G01N 23/20 (2013.01); G06N 3/08 (2013.01); G01N 23/20008 (2013.01); G01N 23/201 (2013.01); G01N 23/207 (2013.01); G01N 2223/052 (2013.01); G01N 2223/054 (2013.01); G01N 2223/056 (2013.01); G01N 2223/0566 (2013.01); G01N 2223/1016 (2013.01); G01N 2223/305 (2013.01); G01N 2223/61 (2013.01);
Abstract
According to an aspect of the present invention, provided is an information processing apparatus comprising a memory configured to store a program; and a processor configured to execute a program so as to output a parameter result in relation to a thin film by inputting a profile result in relation to an intensity of X-ray from the thin film to a neural network, wherein the neural network is a neural network that is allowed to machine-learn teacher data using profile data in relation to an intensity of X-ray from a thin film as input data and using parameter data in relation to the thin film as output data.