The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2026
Filed:
May. 03, 2023
Yield Engineering Systems, Inc., Fremont, CA (US);
Tapani Laaksonen, Fremont, CA (US);
M Ziaul Karim, San Jose, CA (US);
Christopher Lane, Los Gatos, CA (US);
Craig Walter Mccoy, Los Gatos, CA (US);
Ramakanth Alapati, Dublin, CA (US);
Yield Engineering Systems, Inc., Fremont, CA (US);
Abstract
A semiconductor processing apparatus includes a process chamber that defines an enclosure. The enclosure includes a substrate support configured to support a substrate and rotate the substrate about a central axis of the process chamber. The substrate support is also configured to move vertically along the central axis and position the substrate at multiple locations in the enclosure. The apparatus also includes one or more UV lamps configured to irradiate a top surface of the substrate supported on the substrate support.