Three-dimensional (3d) metal-insulator-metal capacitor (mimcap) including stacked vertical metal studs for increased capacitance density and related fabrication methods

Abstract

A three-dimensional (3D) metal-insulator-metal capacitor (MIMCAP) includes a plurality of center studs disposed within cavity walls of a plurality of cavities in a top plate. The center studs and the cavity walls are oriented orthogonal to a first metal layer and extend through a first via layer and a second metal layer. Each center stud includes a metal layer stud in the second metal layer stacked on a via layer stud in the first via layer. A dielectric layer is disposed between the center studs and the cavity walls of the plurality of cavities in the top plate. The center studs are coupled to a first electrode, and the top plate is coupled to a second electrode in the interconnect layers. In some examples, the center studs can form vertically oriented cylindrical capacitive elements positioned for high capacitance density.