The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2026
Filed:
Mar. 10, 2023
Applicant:
Stmicroelectronics International N.v., Geneva, CH;
Inventors:
Assignee:
STMicroelectronics International N.V., Geneva, CH;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/485 (2006.01); G01J 5/02 (2022.01); G01K 7/01 (2006.01); H01L 23/522 (2006.01); H10F 39/00 (2025.01); H10D 86/00 (2025.01);
U.S. Cl.
CPC ...
G01K 7/015 (2013.01); G01J 5/024 (2013.01); H01L 23/485 (2013.01); H01L 23/5226 (2013.01); H10F 39/011 (2025.01); H10D 86/201 (2025.01);
Abstract
Disclosed herein are thermal sensor devices including TMOS devices with a mass suspended over a cavity by springs extending between a frame and the mass. The thermal sensor devices include stoppers that limit upward and/or downward movement of the springs and therefore the mass. These stoppers are formed from sidewalls supporting a top cap over the frame, springs, and mass. The stoppers are constructed by using various overlapping metal layers during fabrication. Details of forming the stoppers using these overlapping metal layers are contained here.