The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2026
Filed:
Nov. 14, 2023
Ebara Corporation, Tokyo, JP;
Keiji Maishigi, Tokyo, JP;
Tetsuro Sugiura, Tokyo, JP;
Katsuaki Usui, Tokyo, JP;
Masahiro Hatakeyama, Tokyo, JP;
Chikako Honma, Tokyo, JP;
Toru Osuga, Tokyo, JP;
Koichi Iwasaki, Tokyo, JP;
Jie Yuan Lin, Tokyo, JP;
EBARA CORPORATION, Tokyo, JP;
Abstract
An information processing apparatus detecting presence or absence of abnormality of a vacuum pump derived from a product produced within a target vacuum pump, including: a determination unit configured to determine a normal variation range or a normal time variation behavior of a target state quantity which is a state quantity varying depending on a load of gas flowing into the vacuum pump, based on at least one of past target state quantities of the target vacuum pump or another vacuum pump; and a comparison unit configured to compare a current target state quantity of the target vacuum pump with the normal variation range or the normal time variation behavior and output the comparison result.