The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 17, 2026

Filed:

Jun. 27, 2023
Applicant:

Globalwafers Co., Ltd., Hsinchu, TW;

Inventor:

Richard Joseph Phillips, St. Peters, MO (US);

Assignee:

GlobalWafers Co., Ltd., Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 15/24 (2006.01); C30B 15/26 (2006.01); C30B 29/06 (2006.01);
U.S. Cl.
CPC ...
C30B 15/24 (2013.01); C30B 15/26 (2013.01); C30B 29/06 (2013.01);
Abstract

A measurement system includes a target object at least partially visible through an opening in a crystal puller. The crystal puller has a silicon melt in a crucible and a reflector defining a central passage through which a crystal is pulled. A detector array captures light through the opening. The detector array is directed to a surface of the silicon melt in the crystal puller and to the target object, and a laser selectively transmits a coherent light beam through the opening to the target object to produce a reflection of the target object on the surface of the silicon melt. An optical modulator pulses the coherent light beams of the laser into discrete coherent light beams having a period, and a lock-in amplifier is connected to the detector array to filter discrete coherent light having the period from captured light.


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