The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2026
Filed:
Oct. 28, 2021
Ebara Corporation, Tokyo, JP;
Masaki Tomita, Tokyo, JP;
Ryosuke Hiwatashi, Tokyo, JP;
EBARA CORPORATION, Tokyo, JP;
Abstract
An occurrence of a varied power feeding to a contact member is suppressed. A substrate holder includes: a frame-shaped supporting mechanism configured to be suspended and held by a plurality of support pillars and to support an outer peripheral portion of a surface to be plated of a substrate; a back plate assembly configured to be arranged on a back surface side of the surface to be plated of the substrate and to sandwich the substrate with the supporting mechanism; a contact memberarranged on the supporting mechanism; and a plurality of power source line members. The contact memberhas a power feeding contact point in contact with the outer peripheral portion of the surface to be plated of the substrate and a plurality of power source connecting portionsconnected to a power source. The plurality of power source line membersare connected from the power source to the plurality of power source connecting portionsthrough the plurality of support pillars, and are routed such that distances from the power source to the plurality of power source connecting portionsbecome equal.