The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 10, 2026
Filed:
Aug. 07, 2024
Applied Materials, Inc., Santa Clara, CA (US);
Hung-Sen Kang, Sunnyvale, CA (US);
Chih-Yang Chang, Santa Clara, CA (US);
Yao-Hung Yang, Santa Clara, CA (US);
Yixing Lin, Saratoga, CA (US);
Applied Materials Inc., Santa Clara, CA (US);
Abstract
A method for tracking of a semiconductor chamber part uses a matrix two-dimensional (2D) code label embedded with a tracking feature. In some embodiments, the method may include selecting a feature to embed into the matrix 2D code label to create a modified matrix 2D code label where the feature does not cause misreading of information from the matrix 2D code label when embedded into the matrix 2D code label and where the feature is configured to change based on treatment of the semiconductor chamber part, forming the modified matrix 2D code label into the semiconductor chamber part, optically inspecting the modified matrix 2D code label to determine changes to the feature, and analyzing the changes to the feature to determine a number of cleaning cycles undergone by the semiconductor chamber part based, at least in part, on the changes to the feature.